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> New advanced energy apex 5513 rf generator ae 5.5 kw
New advanced energy apex 5513 rf generator ae 5.5 kw
This Unique RF Generator has a Single Phase Power Input of 208 to 229VAC and is ideal for those without access to 3 phase power.
This also sports the Pulsing Option, Pulsing can be enabled or disabled. When enabled it can be pulsed from 150Hz to 50kHz with a Duty Cycle from 10 to 90%
This Generator has a high power density as it packs 5.5kw output in a shoebox size pacakge. This would be great to replace an oversized ENI, Henry, Comdel, RFPP, or Huttinger RF Generator. Think of all the space you can free up.
Guaranteed NEW as Decribed and Fully Functional, 30 Day DOA Warranty
The Part Number Specifies the following:
3 - Output Frequency: 13.56MHz +/-.005%
5 - Input Voltage: 220,208 to 229 VAC, 1 Phase, 47/63 Hz w/o Breaker
L - Packaging: On Board Frame Mount, Opposite End LED's w/4 Handles
0 - Panel: None(on board frame mount)
0 - Serial I/O: Default (RS-232 with AE Bus)
0 - Serial Port 2: Default( no secondary serial port)
B - User Port Options: 25- pin APEX Standard
1 - On-board TF Output Connector Loaction: utilities end (near water connections)
2 - Output Connector: SQS Connector
0 - RF Measurement: Directional Coupler
R - AC Power Input: Harting 4 Pin Male Connector
1 - Water fitting threads: 3/8 NPT Female
A - Custom Configuration: Standard Configurations
The following exerpt is from the Advanced Energy Website at: http:// /en/Apex.html
Check out the site for more information.
Apex® RF Power-Delivery Systems
The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.
* Improved process flexibility
* Simplified process tool integration
* On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
* Wideband control loops and optional, high repetition-rate pulsing
* Industry-leading arc management
